High-Precision MFC Gas Delivery System
High-Precision Mass Flow Controller (MFC) Gas Delivery System – Mobile, space-saving cabinet design with intelligent touchscreen control for advanced CVD and annealing setups.
The GYS-xZ Series is a premium, CE-certified gas delivery and mixing system engineered to provide absolute volumetric accuracy of gas mixtures for laboratory processing. Operating with a high-accuracy threshold of ±1.5% FS, it is available in 2, 3, 4, or 5-channel configurations. The entire gas manifold, mixing vessels, and high-purity piping are neatly integrated into a heavy-duty mobile cabinet that can support up to 1000 lbs, allowing you to place a tube muffle furnace directly on top to save premium laboratory bench space.
Featuring a brilliant 7-inch LCD touch screen, real-time flow rate charting, and high-purity stainless steel gas channels, this intelligent gas mixing station represents the ideal professional solution for materials synthesis, CVD film growth, and atmospheric annealing in the UK.
Exclusive UK Distributor: Benli Lab – Direct from Hefei Weiyuansu with full local technical support.
High-Precision Mass Flow Controller (MFC) Gas Delivery System – GYS-xZ Series
Benli Lab is the Exclusive UK Distributor of Hefei Weiyuansu Laboratory Equipment. The GYS-xZ series (covering 2Z, 3Z, 4Z, and 5Z configurations) is a highly reliable, low-cost gas delivery platform designed to eliminate gas stoichiometric fluctuations. By consolidating industrial-grade Mass Flow Controllers (MFCs), an integrated stainless steel mixing tank, and a smart digital controller into a heavy-duty mobile cart, it provides academic and industrial labs across the United Kingdom with a seamless, highly repeatable mixing hub. The system operates on an intuitive touchscreen interface, allowing researchers to monitor real-time flow curves, log historical deposition gas parameters, and safely manage anaerobic environments inside high-temperature muffle or tube furnaces.
Key Features & Benefits
- Smart 7-Inch Touchscreen Interface – Visually monitors, adjusts, and records all gas flow rates in real-time. Features on-screen flow curves and historical data logs to ensure absolute batch-to-batch processing repeatability.
- Space-Saving Mobile Cabinet – Heavy-duty structural metal cart with locking caster wheels is designed to support up to 1000 lbs (approx. 450 kg). Place your tube furnace directly on top of the cabinet to consolidate space.
- High-Purity Modular Mixing – Built with an internal, high-integrity stainless steel mixing vessel (Φ76 × 154 mm) equipped with non-return check valves to ensure perfect, turbulent gas blending of up to 5 discrete gases without backflow risks.
- Reliable Gas Seals & Fittings – Internal gas lines are assembled with premium double-ferrule compression Swagelok-style connectors and 6.35 mm (1/4 inch) high-purity stainless steel and PTFE plumbing lines.
- Flexible Multi-Channel Scale – Available in modular 2-channel (GYS-2Z), 3-channel (GYS-3Z), 4-channel (GYS-4Z), or 5-channel (GYS-5Z) builds with customizable flow range scales.
- Certifications & Quality – Assembled in full compliance with international CE, UL, and MET standards using globally recognized sub-components (such as ABB electrical breakers and specialized safety loops).
Technical Specifications
GYS-2Z / 3Z / 4Z / 5Z – Series Gas Delivery Specifications
• Rated Power: 25 W | Voltage: 220V 50/60Hz Standard Power Interface
• Mass Flow Controller Accuracy: ±1.5% FS (Full Scale)
• Flow Repeatability: ±0.2% FS
• Max System Pressure Limit: 0.15 MPa (Operating pressure: 0.07 to 0.25 MPa recommended via reducing valves)
• Mechanical Pressure Gauge Range: -0.1 to 0.15 MPa
• Internal Mixing Tank Size: Φ76 × 154 mm (High-Purity Stainless Steel)
• Connection Porting: 6.35 mm (1/4") double-ferrule compression compression fittings
• Internal Plumbing Materials: High-Purity 316L Stainless Steel and PTFE
Modular Channel Models:
• GYS-2Z: 2 Independent Gas Channels with separate digital MFC flow valves
• GYS-3Z: 3 Independent Gas Channels (Supports 2-gas mixing + 1 independent channel bypass)
• GYS-4Z: 4 Independent Gas Channels (Supports 3-gas mixing + 1 independent channel bypass)
• GYS-5Z: 5 Independent Gas Channels with separate digital MFC flow valves
Standard MFC Flow Rate Ranges (Customizable):
• Low Range: 1 to 100 SCCM
• Medium Range: 1 to 200 SCCM / 1 to 500 SCCM
• High Range: 1 to 1000 SCCM (Other ranges up to several SLPM customizable)
Dimensions & Weight:
• External Cabinet Dimensions (W × D × H): 610 × 610 × 710 mm
• Caster Payload Rating: up to 1000 lbs (approx. 450 kg)
• Net Weight: ≈ 30 kg
* Customisation available. Specifications subject to final confirmation.
Safety Warning: Standard configurations are not recommended for toxic, explosive, or aggressively corrosive gases. If you intend to run corrosive gases (e.g., HCl, NH3) or highly reactive compounds, please notify our sales engineers at the time of ordering to integrate a specialized, fully corrosion-resistant 316L/VCR metal-sealed gas plumbing package.
Applications
Perfect for Chemical Vapor Deposition (CVD/PECVD) processing, non-oxidizing powder sintering, protective atmosphere annealing, custom gas mixing and blending, materials characterisation, and controlled anaerobic chemical reactions in materials discovery.
Why Choose Benli Lab? Direct factory access ensures genuine equipment, best pricing, customisation options, and dedicated UK-based technical support, installation guidance, and after-sales service.
Benli Lab – Empowering UK Research with Innovative High-Temperature Laboratory Solutions
| Model | GYS-xZ |
|---|---|
| Dimensions (mm) | 610mm*600mm*710mm |
| Weight (kg) | 30 |
| Customisation Available | Yes |
| Voltage | 220V - 230V |